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We summarized The present improvement position in the significant-electrical power DUV laser each for the wavelength of FHG of the one-μm laser and at 193 nm. The recent progress from the reliable-point out/fiber laser, plus the nonlinear optical crystals, prompts don't just the average electricity but also the beam top quality (coherence) of your DUV lasers to an unprecedented degree.

The typical power of your NIR laser even now has the probable to get enhanced to tens of watts for example 70 W [26] In the event the double-go configuration may very well be utilized for that Yb:YAG SCF amplifier stage. For this reason, When the conversion performance of 31% from NIR to DUV might be continue to taken care of at this better electricity condition, the common output electric power from the DUV laser at 258 nm may be much more than 20 W, which would be considered a impressive ability stage for the DUV laser and result in the unanticipated DUV laser machining benefits. Additionally, for prime-electricity DUV laser, the UV hurt on the nonlinear crystal, including the windows for CLBO crystal and also the mirrors, is yet another important parameter for lasting and steady operation.

Then again, the beam high quality of the bigger energy DUV laser would turn into worse resulting from extra serious thermal and nonlinear effects. Hence, the frequency conversion procedures need to be carefully made to mitigate the aforementioned effects. Thus, a high-ability DUV laser within the FHG of one μm with an excellent beam quality can be received and will be effective for acquiring the shorter wavelength DUV lasers such as 193 nm by SFG.

Both equally the 1040 nm and 1078 nm laser originate from a single twin-wavelength Yb-doped fiber laser. Each and every laser is amplified by levels of fiber amplifier and Yb-doped resources amplifier, respectively.

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Tunable ultraviolet laser source determined by reliable-condition dye laser engineering and CsLiB6O10 harmonic generation

The conversion performance from basic NIR to DUV is from five% to 36% based on the claimed leads to Table one. Increasing the conversion performance will lessen the burden on the design and set up of the elemental laser amplifier along with the electrical electric power use. A great beam good quality of the basic laser will likely add into the increasing in the conversion effectiveness and also the suitable electricity intensity in the NIR and eco-friendly laser inside the SHG and FHG method, respectively. The very best conversion efficiencies from NIR to eco-friendly and green to DUV laser by usage of CLBO crystal are 70% and all over 50%, respectively [twelve], which corresponds to your conversion performance of 35% from elementary to DUV.

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